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X-ray diffraction evidence for epitaxial microcrystallinity in thermally oxidized SiO<sub>2</sub>thin films on the Si(001) surface

PaperCitations, authors & open-access status

X-ray diffraction evidence for epitaxial microcrystallinity in thermally oxidized SiO<sub>2</sub>thin films on the Si(001) surface is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 52 citations, 1993 year and closed oa status.

52
Citations
1993
Year
closed
OA Status

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