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Advanced MEMS and NEMS Technologies
TopicLeading institutions, researchers & key papers
This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
34
Works
IDs:OpenAlex
How has Advanced MEMS and NEMS Technologies's publication output changed over time?
ScholarIQpublication output · 2002–2025
Output grew0% over the shown period — from 1 works in 2002 to 1 in 2025.
1
1
1
1
1
1
1
1
1
1
2002200720092011201420152021202220242025
What are the most-cited papers on Advanced MEMS and NEMS Technologies?
ScholarIQmost cited works
Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors
Najib Kacem, Sébastien Hentz, Duane S. Pinto, Benjamin Reig, van Nghi Nguyen
S206811868. 2009205 CitationsOPEN ACCESS
Micro manipulation based on micro physics-strategy based on attractive force reduction and stress measurement
Fumihito Arai, Daichi Ando, Toshio Fukuda, Y. Nonoda, T. Oota
2002147 Citations
Surface Free Energy Model of Silicon Anisotropic Etching
Peter J. Hesketh, Chishein Ju, Sanjay Gowda, Elmer S. Zanoria, S. Danyluk
S138759888. 1993109 Citations
Modeling and Evaluation of Low-Cost Force Sensors
Cyrille Lebossé, Pierre Renaud, Bernard Bayle, Michel de Mathelin
IEEE Transactions on Robotics. 2011101 Citations
MEMS Oscillators for High Volume Commercial Applications
M. Lutz, Aaron Partridge, Pallavi Gupta, N.I. Buchan, E.H. Klaassen, J. F. McDonald, K. Petersen
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. 200786 Citations
Where is Advanced MEMS and NEMS Technologies research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
Funder breakdown is a member featureSign up free to unlock
How much of the research on Advanced MEMS and NEMS Technologies is open access?
ScholarIQopen access share
17%OPEN ACCESS
Gold
8%
Green
8%
Hybrid
0%
Bronze
0%
Closed
83%
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