ScholarIQanswers from OpenAlex
Advanced MEMS and NEMS Technologies
TopicLeading institutions, researchers & key papers
Advanced MEMS and NEMS Technologies is a topic indexed in ScholarIQ from OpenAlex.
What is known about Advanced MEMS and NEMS Technologies?
ScholarIQrecord summary
This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
How many works does Advanced MEMS and NEMS Technologies have?
ScholarIQindexed works
Advanced MEMS and NEMS Technologies has 34 works in the ScholarIQ index. The count is the OpenAlex total, not the number of papers listed on this page.
What is the OpenAlex record for Advanced MEMS and NEMS Technologies?
ScholarIQopenalex
The OpenAlex for Advanced MEMS and NEMS Technologies is on the source record.
What are the most-cited papers on Advanced MEMS and NEMS Technologies?
ScholarIQmost cited works
Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors
Najib Kacem, Sébastien Hentz, Duane S. Pinto, Benjamin Reig, van Nghi Nguyen
Micro manipulation based on micro physics-strategy based on attractive force reduction and stress measurement
Fumihito Arai, Daichi Ando, Toshio Fukuda, Y. Nonoda, T. Oota
Surface Free Energy Model of Silicon Anisotropic Etching
Peter J. Hesketh, Chishein Ju, Sanjay Gowda, Elmer S. Zanoria, S. Danyluk
Modeling and Evaluation of Low-Cost Force Sensors
Cyrille Lebossé, Pierre Renaud, Bernard Bayle, Michel de Mathelin
MEMS Oscillators for High Volume Commercial Applications
M. Lutz, Aaron Partridge, Pallavi Gupta, N.I. Buchan, E.H. Klaassen, J. F. McDonald, K. Petersen
Where is Advanced MEMS and NEMS Technologies research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
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How much of the research on Advanced MEMS and NEMS Technologies is open access?
ScholarIQopen access share
17%OPEN ACCESS