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Advanced MEMS and NEMS Technologies

TopicLeading institutions, researchers & key papers

Advanced MEMS and NEMS Technologies is a topic indexed in ScholarIQ from OpenAlex.

What is known about Advanced MEMS and NEMS Technologies?

ScholarIQrecord summary

This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.

How many works does Advanced MEMS and NEMS Technologies have?

ScholarIQindexed works

Advanced MEMS and NEMS Technologies has 34 works in the ScholarIQ index. The count is the OpenAlex total, not the number of papers listed on this page.

What is the OpenAlex record for Advanced MEMS and NEMS Technologies?

ScholarIQopenalex

The OpenAlex for Advanced MEMS and NEMS Technologies is on the source record.

What are the most-cited papers on Advanced MEMS and NEMS Technologies?

ScholarIQmost cited works
Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors
Najib Kacem, Sébastien Hentz, Duane S. Pinto, Benjamin Reig, van Nghi Nguyen
Nanotechnology. 2009205 CitationsOPEN ACCESS
Micro manipulation based on micro physics-strategy based on attractive force reduction and stress measurement
Fumihito Arai, Daichi Ando, Toshio Fukuda, Y. Nonoda, T. Oota
2002147 Citations
Surface Free Energy Model of Silicon Anisotropic Etching
Peter J. Hesketh, Chishein Ju, Sanjay Gowda, Elmer S. Zanoria, S. Danyluk
Journal of The Electrochemical Society. 1993109 Citations
Modeling and Evaluation of Low-Cost Force Sensors
Cyrille Lebossé, Pierre Renaud, Bernard Bayle, Michel de Mathelin
IEEE Transactions on Robotics. 2011101 Citations
MEMS Oscillators for High Volume Commercial Applications
M. Lutz, Aaron Partridge, Pallavi Gupta, N.I. Buchan, E.H. Klaassen, J. F. McDonald, K. Petersen
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. 200786 Citations

Where is Advanced MEMS and NEMS Technologies research published, and who funds it?

ScholarIQvenues & funding sources

TOP FUNDERS

National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
Funder breakdown is a member featureSign up free to unlock

How much of the research on Advanced MEMS and NEMS Technologies is open access?

ScholarIQopen access share
17%OPEN ACCESS
Gold
8%
Green
8%
Hybrid
0%
Bronze
0%
Closed
83%

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