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IEEE Transactions on Semiconductor Manufacturing
JournalCitation impact & published research
IEEE Transactions on Semiconductor Manufacturing is a journal indexed in ScholarIQ from OpenAlex.
What is the OpenAlex record for IEEE Transactions on Semiconductor Manufacturing?
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The OpenAlex for IEEE Transactions on Semiconductor Manufacturing is on the source record.
What are the most-cited papers on IEEE Transactions on Semiconductor Manufacturing?
ScholarIQmost cited works
A Convolutional Neural Network for Fault Classification and Diagnosis in Semiconductor Manufacturing Processes
Ki Bum Lee, Sejune Cheon, Chang Ouk Kim
Convolutional Neural Network for Wafer Surface Defect Classification and the Detection of Unknown Defect Class
Sejune Cheon, Hankang Lee, Chang Ouk Kim, Seok Hyung Lee
Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing
B.E. Stine, Dennis O. Ouma, R. Divecha, Duane S. Boning, J.E. Chung, Dale L. Hetherington, C.R. Harwoo, O.S. Nakagawa, Soo‐Young Oh
A Deep Learning Model for Robust Wafer Fault Monitoring With Sensor Measurement Noise
Hoyeop Lee, Youngju Kim, Chang Ouk Kim
Transfer-Learning-Based Online Mura Defect Classification
Hua Yang, Shuang Mei, Kaiyou Song, Bo Tao, Zhouping Yin