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A 0.602 /spl mu/m/sup 2/ nestled 'Chain' cell structure formed by one mask etching process for 64 Mbit FeRAM

PaperCitations, authors & open-access status

A 0.602 /spl mu/m/sup 2/ nestled 'Chain' cell structure formed by one mask etching process for 64 Mbit FeRAM is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 16 citations, 2004 year and closed oa status.

16
Citations
2004
Year
closed
OA Status

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