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A 10nm high performance and low-power CMOS technology featuring 3<sup>rd</sup> generation FinFET transistors, Self-Aligned Quad Patterning, contact over active gate and cobalt local interconnects
PaperCitations, authors & open-access status
A 10nm high performance and low-power CMOS technology featuring 3<sup>rd</sup> generation FinFET transistors, Self-Aligned Quad Patterning, contact over active gate and cobalt local interconnects is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 372 citations, 2017 year and closed oa status.
372
Citations
2017
Year
closed
OA Status