ScholarIQanswers from OpenAlex
A physics-informed Run-to-Run control framework for semiconductor manufacturing
PaperCitations, authors & open-access status
A physics-informed Run-to-Run control framework for semiconductor manufacturing is a paper indexed in ScholarIQ from OpenAlex.
How many citations does A physics-informed Run-to-Run control framework for semiconductor manufacturing have?
ScholarIQcitation count
A physics-informed Run-to-Run control framework for semiconductor manufacturing has 22 citations in the OpenAlex counts ScholarIQ stores.
When was A physics-informed Run-to-Run control framework for semiconductor manufacturing published?
ScholarIQyear
A physics-informed Run-to-Run control framework for semiconductor manufacturing has 2020 year in the ScholarIQ index.
What is the open-access status of A physics-informed Run-to-Run control framework for semiconductor manufacturing?
ScholarIQoa status
A physics-informed Run-to-Run control framework for semiconductor manufacturing has closed oa status in the ScholarIQ index.
What is the DOI of A physics-informed Run-to-Run control framework for semiconductor manufacturing?
ScholarIQdoi
The DOI for A physics-informed Run-to-Run control framework for semiconductor manufacturing is on the source record.
What is the OpenAlex record for A physics-informed Run-to-Run control framework for semiconductor manufacturing?
ScholarIQopenalex
The OpenAlex for A physics-informed Run-to-Run control framework for semiconductor manufacturing is on the source record.