ScholarIQanswers from OpenAlex
Dry etch challenges for CD shrinkage in memory process
PaperCitations, authors & open-access status
Dry etch challenges for CD shrinkage in memory process is a paper indexed in ScholarIQ from OpenAlex.
How many citations does Dry etch challenges for CD shrinkage in memory process have?
ScholarIQcitation count
Dry etch challenges for CD shrinkage in memory process has 6 citations in the OpenAlex counts ScholarIQ stores.
When was Dry etch challenges for CD shrinkage in memory process published?
ScholarIQyear
Dry etch challenges for CD shrinkage in memory process has 2015 year in the ScholarIQ index.
What is the open-access status of Dry etch challenges for CD shrinkage in memory process?
ScholarIQoa status
Dry etch challenges for CD shrinkage in memory process has closed oa status in the ScholarIQ index.
What is the DOI of Dry etch challenges for CD shrinkage in memory process?
ScholarIQdoi
The DOI for Dry etch challenges for CD shrinkage in memory process is on the source record.
What is the OpenAlex record for Dry etch challenges for CD shrinkage in memory process?
ScholarIQopenalex
The OpenAlex for Dry etch challenges for CD shrinkage in memory process is on the source record.