Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography
Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography is a paper indexed in ScholarIQ from OpenAlex.
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Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography has 34 citations in the OpenAlex counts ScholarIQ stores.
When was Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography published?
Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography has 2010 year in the ScholarIQ index.
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Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography has bronze oa status in the ScholarIQ index.
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