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Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography

PaperCitations, authors & open-access status

Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 34 citations, 2010 year and bronze oa status.

34
Citations
2010
Year
bronze
OA Status

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Tsuyoshi Ogawa
Author
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