ScholarIQanswers from OpenAlex
Journal of Micro/Nanolithography MEMS and MOEMS
JournalCitation impact & published research
Journal of Micro/Nanolithography MEMS and MOEMS is a journal indexed in ScholarIQ from OpenAlex.
How many works does Journal of Micro/Nanolithography MEMS and MOEMS have?
ScholarIQindexed works
Journal of Micro/Nanolithography MEMS and MOEMS has 1,675 works in the ScholarIQ index. The count is the OpenAlex total, not the number of papers listed on this page.
How many citations does Journal of Micro/Nanolithography MEMS and MOEMS have?
ScholarIQcitation count
Journal of Micro/Nanolithography MEMS and MOEMS has 17,765 citations in the OpenAlex counts ScholarIQ stores.
What is the h-index of Journal of Micro/Nanolithography MEMS and MOEMS?
ScholarIQh-index
Journal of Micro/Nanolithography MEMS and MOEMS has an h-index of 48 in OpenAlex.
What is the OpenAlex record for Journal of Micro/Nanolithography MEMS and MOEMS?
ScholarIQopenalex
The OpenAlex for Journal of Micro/Nanolithography MEMS and MOEMS is on the source record.
What are the most-cited papers on Journal of Micro/Nanolithography MEMS and MOEMS?
ScholarIQmost cited works
Deep learning-based detection, classification, and localization of defects in semiconductor processes
Dhruv Patel, Ravi Bonam, Assad A. Oberai