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Journal of Micro/Nanolithography MEMS and MOEMS
JournalCitation impact & published research
Journal of Micro/Nanolithography MEMS and MOEMS is a journal indexed in ScholarIQ from OpenAlex. ScholarIQ records 1,675 works, 17,765 citations and an h-index of 48.
1,675
Works
17,765
Citations
48
h-index
IDs:OpenAlex
What are the most-cited papers on Journal of Micro/Nanolithography MEMS and MOEMS?
ScholarIQmost cited works
Deep learning-based detection, classification, and localization of defects in semiconductor processes
Dhruv Patel, Ravi Bonam, Assad A. Oberai
Journal of Micro/Nanolithography MEMS and MOEMS. 202025 Citations
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