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Deep learning-based detection, classification, and localization of defects in semiconductor processes
PaperCitations, authors & open-access status
Deep learning-based detection, classification, and localization of defects in semiconductor processes is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 25 citations, 2020 year and closed oa status.
25
Citations
2020
Year
closed
OA Status