ScholarIQanswers from OpenAlex
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
JournalCitation impact & published research
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films is a journal indexed in ScholarIQ from OpenAlex.
What is the OpenAlex record for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films?
ScholarIQopenalex
The OpenAlex for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films is on the source record.
What are the most-cited papers on Journal of Vacuum Science & Technology A Vacuum Surfaces and Films?
ScholarIQmost cited works
Mechanisms for hydrophilic/hydrophobic wetting transitions on cellulose cotton fibers coated using Al2O3 atomic layer deposition
Kyoung-Mi Lee, Jesse S. Jur, Do Han Kim, Gregory N. Parsons
Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
Oili Ylivaara, Lauri Kilpi, Xuwen Liu, Sakari Sintonen, Saima Ali, Mikko Laitinen, Jaakko Julin, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo‐Pekka Hannula, Helena Ronkainen, Riikka L. Puurunen
Model for a multiple-step deep Si etch process
Shahid Rauf, William J. Dauksher, Stephen Clemens, Kenneth H. Smith
Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon
Lauri Kilpi, Oili Ylivaara, Antti Vaajoki, Jari Malm, Sakari Sintonen, M. Tuominen, Riikka L. Puurunen, Helena Ronkainen
Characterization of low dielectric constant plasma enhanced chemical vapor deposition fluorinated silicon oxide films as intermetal dielectric materials
Kwangtaek Kim, Dae‐Hyuk Kwon, G. Nallapati, G. S. Lee