ScholarIQanswers from OpenAlex
Model for a multiple-step deep Si etch process
PaperCitations, authors & open-access status
Model for a multiple-step deep Si etch process is a paper indexed in ScholarIQ from OpenAlex.
How many citations does Model for a multiple-step deep Si etch process have?
ScholarIQcitation count
Model for a multiple-step deep Si etch process has 52 citations in the OpenAlex counts ScholarIQ stores.
When was Model for a multiple-step deep Si etch process published?
ScholarIQyear
Model for a multiple-step deep Si etch process has 2002 year in the ScholarIQ index.
What is the open-access status of Model for a multiple-step deep Si etch process?
ScholarIQoa status
Model for a multiple-step deep Si etch process has closed oa status in the ScholarIQ index.
What is the DOI of Model for a multiple-step deep Si etch process?
ScholarIQdoi
The DOI for Model for a multiple-step deep Si etch process is on the source record.
What is the OpenAlex record for Model for a multiple-step deep Si etch process?
ScholarIQopenalex
The OpenAlex for Model for a multiple-step deep Si etch process is on the source record.