ScholarIQanswers from OpenAlex
Virtual metrology models for predicting avera PECVD oxide film thickne
PaperCitations, authors & open-access status
Virtual metrology models for predicting avera PECVD oxide film thickne is a paper indexed in ScholarIQ from OpenAlex.
How many citations does Virtual metrology models for predicting avera PECVD oxide film thickne have?
ScholarIQcitation count
Virtual metrology models for predicting avera PECVD oxide film thickne has 10 citations in the OpenAlex counts ScholarIQ stores.
When was Virtual metrology models for predicting avera PECVD oxide film thickne published?
ScholarIQyear
Virtual metrology models for predicting avera PECVD oxide film thickne has 2011 year in the ScholarIQ index.
What is the open-access status of Virtual metrology models for predicting avera PECVD oxide film thickne?
ScholarIQoa status
Virtual metrology models for predicting avera PECVD oxide film thickne has closed oa status in the ScholarIQ index.
What is the DOI of Virtual metrology models for predicting avera PECVD oxide film thickne?
ScholarIQdoi
The DOI for Virtual metrology models for predicting avera PECVD oxide film thickne is on the source record.
What is the OpenAlex record for Virtual metrology models for predicting avera PECVD oxide film thickne?
ScholarIQopenalex
The OpenAlex for Virtual metrology models for predicting avera PECVD oxide film thickne is on the source record.